JPH0439886B2 - - Google Patents
Info
- Publication number
- JPH0439886B2 JPH0439886B2 JP3584186A JP3584186A JPH0439886B2 JP H0439886 B2 JPH0439886 B2 JP H0439886B2 JP 3584186 A JP3584186 A JP 3584186A JP 3584186 A JP3584186 A JP 3584186A JP H0439886 B2 JPH0439886 B2 JP H0439886B2
- Authority
- JP
- Japan
- Prior art keywords
- hologram
- light
- wavefronts
- phase
- film thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 12
- 238000010008 shearing Methods 0.000 claims description 11
- 238000005286 illumination Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 description 31
- 239000010408 film Substances 0.000 description 24
- 239000010409 thin film Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 230000004075 alteration Effects 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004061 bleaching Methods 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010291 electrical method Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- ORUIBWPALBXDOA-UHFFFAOYSA-L magnesium fluoride Chemical compound [F-].[F-].[Mg+2] ORUIBWPALBXDOA-UHFFFAOYSA-L 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3584186A JPS62192604A (ja) | 1986-02-20 | 1986-02-20 | シアリング干渉コントラスト法膜厚測定装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3584186A JPS62192604A (ja) | 1986-02-20 | 1986-02-20 | シアリング干渉コントラスト法膜厚測定装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62192604A JPS62192604A (ja) | 1987-08-24 |
| JPH0439886B2 true JPH0439886B2 (en]) | 1992-07-01 |
Family
ID=12453200
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3584186A Granted JPS62192604A (ja) | 1986-02-20 | 1986-02-20 | シアリング干渉コントラスト法膜厚測定装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62192604A (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0781818B2 (ja) * | 1991-12-11 | 1995-09-06 | 工業技術院長 | レンズ横収差測定用シアリング干渉計 |
| JP6817642B2 (ja) | 2016-08-24 | 2021-01-20 | 公立大学法人兵庫県立大学 | エリプソメトリ装置およびエリプソメトリ方法 |
-
1986
- 1986-02-20 JP JP3584186A patent/JPS62192604A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62192604A (ja) | 1987-08-24 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |